Laser integrated measurement of surface roughness and micro-displacement

An optical method based on laser scattering and optical triangulation for measurement of surface roughness and micro-displacement measurement is proposed. The technique allows evaluation of surface roughness and micro-displacement of a specimen using just one device. The principle of the method and the basic instrumentation design an described and the validity of the principle is demonstrated by experimental evaluations. Results show that, for specimens with surface roughnesses (R-a) in the range 0.005-0.1 mu m, displacements in the range +/-300 mu m can be readily measured.