Three-dimensional microfabrication by use of single-photon-absorbed polymerization

We developed a promising method to fabricate three-dimensional microstructures by using single-photon-absorbed polymerization confined to the vicinity of a tightly focused spot. This localized polymerization is based on the nonlinear response of the photopolymerizable resin to optical intensity with sufficiently low exposure. The nonlinear response was verified by measuring polymerization exotherm at different light intensities. The proposed method enables us to make even movable microstructures without any of the supporting parts or sacrificial layers normally required with conventional micromachining. In the experiment reported here, we fabricated a microgear with an external diameter of 47 mu m and an attached shaft. (C) 2000 American Institute of Physics. [S0003-6951(00)02319-6].