期刊
MATERIALS CHEMISTRY AND PHYSICS
卷 64, 期 3, 页码 184-188出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0254-0584(99)00256-4
关键词
tin oxide; thin films; spray pyrolysis; X-ray diffraction; electrical properties
Antimony doped SnO2 films have been prepared by spray pyrolysis. The films deposited at an optimised substrate temperature of 520 degrees C were found to have a resistivity as low as 0.4 x 10(-4) Omega cm. Doping concentration of Sb in the spraying solution was varied from 0.5 to 5%, keeping the spray rate constant. The sheet resistance was as low as 6 Omega cm(-2). About 80% average transmission in the visible region was obtained for 1% Sb doped films. The refractive index increased from 1.62 to 2.64 with increasing the Sb content from 0 to 5%. Van-der-Pauw's four probe technique of conductivity measurement was used to measure electrical conductivity (sigma), Hall coefficient (R-H), carrier concentration (n) and Hall mobility (mu(H)) of the Sb:SnO2 films. The hims deposited using 1% Sb doping showed the best properties. (C) 2000 Elsevier Science S.A. AII rights reserved.
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