期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 82, 期 1-3, 页码 219-223出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0924-4247(99)00337-4
关键词
stiction; SAM; adhesion; friction
Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization and reliability of many micro-electro-mechanical systems (MEMS) devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics of the coated microstructures are described, followed by a discussion of the current limitations, areas for improvements and recent progress for this coating technology. (C) 2000 Elsevier Science S.A. All rights reserved.
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