4.6 Article

Accumulation hole layer in p-GaN/AlGaN heterostructures

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APPLIED PHYSICS LETTERS
卷 76, 期 21, 页码 3061-3063

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AMER INST PHYSICS
DOI: 10.1063/1.126579

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We present the results on piezoelectric and pyroelectric doping in AlGaN-on-GaN and GaN-on-AlGaN heterostructures and demonstrate p-GaN/AlGaN structures with accumulation hole layer. Our results indicate that polarization charge can induce up to 5x10(13) cm(-2) holes at the AlGaN/GaN heterointerfaces. We show that the transition from three-dimensional (3D) to two-dimensional (2D) hole gas can be only achieved for hole sheet densities on the order of 10(13) cm(-2) or higher. At lower densities, only 3D-hole accumulation layer may exist. These results suggest that a piezoelectrically induced 2D-hole gas can be used for the reduction of the base spreading resistance in AlGaN/GaN-based heterostructure bipolar transistors. (C) 2000 American Institute of Physics. [S0003-6951(00)00421-6].

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