期刊
APPLIED SURFACE SCIENCE
卷 159, 期 -, 页码 8-13出版社
ELSEVIER
DOI: 10.1016/S0169-4332(00)00126-4
关键词
optical interconnection; interfacial roughness; Si, SiO2
Silicon microphotonics is the optical equivalent of microelectronics for integrated circuits. Photonics enables interconnection bandwidth that is not limited by the resistance, capacitance and reliability constraints of metal lines. The key issue is the integration of photonic components with integrated circuit electronics. (C) 2000 Elsevier Science B.V. All rights reserved.
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