Preparation of ceria films by spray pyrolysis method

The deposition of CeO2 films on fused-silica substrates by spray pyrolysis of a water-ethanol solution of a cerium nitrate precursor has been studied. Polycrystalline films have been obtained at a substrate temperature of 300-450 degrees C after annealing of the deposit in air at temperatures in the range 350-500 degrees C. It has been established that the best uniform ceria films with nanometric scale grains are prepared at a substrate temperature of 400 degrees C with 0.5 h annealing of the deposit at 500 degrees C. At lower spraying temperatures large CeO2 crystallites have been observed on the film surface along with the fine grains. When the substrate temperature exceeds 400 degrees C, numerous cracks caused by thermal stresses appear in the films. (C) 2000 Elsevier Science Ltd. All rights reserved.