期刊
IEEE-ASME TRANSACTIONS ON MECHATRONICS
卷 5, 期 2, 页码 199-211出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/3516.847093
关键词
atomic-force microscope; force control; micro/nano forces; micro/nano-mechatronics; nanoparticle assembly
In this paper, a nano-robotic manipulation system using an atomic force microscope probe as the pushing manipulator and force and topology sensor is proposed. The task is the two-dimensional positioning of nanometer-size particles on a substrate in ambient conditions. Thus, the modeling of interaction forces and dynamics during the pushing operation is analyzed, and compared with the experimental results for an improved understanding of the nano scale physical phenomenon which is different from macro scale physics. Simulations and experiments are held for determining the conditions and strategies for reliable manipulation and determining the affecting parameters. The results show that the latex particles with 242- and 484-nm radii can be positioned on Si substrates successfully with around 30-nm accuracy, and the behavior of the particle motion during pushing can be predicted from the experimental data.
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