期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 65, 期 1-3, 页码 91-93出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0925-4005(99)00333-0
关键词
mode of operation; stannic oxide sensors; selectivity
Stannic oxide sensors were developed to monitor CO concentrations (10-200 ppm). Cross sensitivities of these sensors against humidity (20-80% r.h.) and methane (400-2000 ppm) can be suppressed by evaluating mode of operation data. For this purpose, a sequence of switched operation temperatures introduces kinetic parameters. The latter are evaluated by model-based, or data-based algorithms. For this approach to achieve high selectivity, micromachined sensor dies are particular suitable as they show low thermal inertia. (C) 2000 Elsevier Science S.A. All rights reserved.
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