期刊
DIAMOND AND RELATED MATERIALS
卷 9, 期 7, 页码 1320-1326出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0925-9635(00)00245-4
关键词
chemical vapor deposition; diamond; radical species; composition
A new C-H-O ternary diagram is presented based on radical species composition showing the regions for diamond deposition, non-diamond deposition, and no deposition from the vapor phase. This construction is based on the steady-state computations of gas-phase and gas-surface chemistry from the data points presented in the C-H-O ternary diagram based on feed gas composition by Bachmann ct al. (P.K. Bachmann, D. Leers, H. Lydtin. Diamond Relat. Mater. 1 (1991) 1). The analysis of the computational results indicates that the radical species composition does distinguish the three regions and helps explain the contradicting experimental data points using non-typical gas mixtures. The analysis also shows that the revised diagram based on radical species composition works only when carbon monoxide (CO) is treated as a non-participating species. The effects of temperature, pressure and flow rates on this new ternary diagram are also detailed. (C) 2000 Elsevier Science S.A. All rights reserved.
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