期刊
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
卷 47, 期 4, 页码 903-915出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/58.852073
关键词
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This paper reviews deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric properties is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented. The state of the art allows some preliminary conclusions.
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