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Elastic constants of cubic boron nitride films

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APPLIED PHYSICS LETTERS
卷 77, 期 14, 页码 2168-2170

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AMER INST PHYSICS
DOI: 10.1063/1.1312201

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The elastic constants of a cubic boron nitride film, with a fraction of tetrahedral bonding of 96% were measured by surface Brillouin spectroscopy. Precise values for both shear and Young modulus were obtained. A comparison with nanoindentation results was made and a critical discussion of the discrepancies is offered. (C) 2000 American Institute of Physics. [S0003-6951(00)01539-4].

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