期刊
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
卷 55, 期 11, 页码 1733-1745出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/S0584-8547(00)00279-2
关键词
surface-wave plasma; plasma temperature; Saha equilibrium
类别
A spectroscopic study of an argon surface wave plasma column at atmospheric pressure under steady-state conditions shows that we are dealing with a two-temperature (2T) discharge whose excitation kinetics are controlled by electron collisions (electron excitation kinetic plasma). A partial local Saha equilibrium in the excitation space is reached from which the 4s and 4p levels are excluded. The absorbed high frequency (HF) power per electron for the maintenance of the discharge (the parameter theta) was found to be a magnitude increasing with the electron density, contrary to what occurs at low pressure. Modifying the work conditions, such as gas flow and HF power, we obtained plasmas that are similar in structure when the end of the plasma is used as a reference position. (C) 2000 Elsevier Science B.V. All rights reserved.
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