Step and flash imprint lithography: Template surface treatment and defect analysis

We have finished the construction of an automated tool for step and flash imprint lithography. The tool was constructed to allow defect studies by making multiple imprints on a 200 mm wafer. The imprint templates for this study were treated with a low surface energy, self-assembled monolayer to ensure selective release at the template-etch barrier interface. This surface treatment is very durable and survives repeated imprints and multiple aggressive physical and chemical cleanings. The imprint and release forces were measured for a number of successive imprints, and did not change significantly. The process appears to be self-cleaning. Contamination on the template is entrained in the polymerizing liquid, and the number of defects is reduced with repeated imprints. (C) 2000 American Vacuum Society. [S0734-211X(00)16106-2].