期刊
JOURNAL OF SYNCHROTRON RADIATION
卷 7, 期 -, 页码 405-410出版社
MUNKSGAARD INT PUBL LTD
DOI: 10.1107/S0909049500010670
关键词
EUV; phase gratings; diffraction; interferometry
The performance of the recently developed EUV phase-shifting point diffraction interferometer (PS/ PDI) depends heavily on the characteristics of the grating beamsplitter used in the implementation. Ideally, such a grating should provide throughput of better than 25% and diffraction efficiency, defined as the ratio of the first-diffracted-order power to the zero-order power, variable in the range from approximately 10 to 500. The optimal method for achieving these goals is by way of a phase grating. Also, PS/PDI system implementation issues favor the use of transmission gratings over reflection gratings. Here, the design, fabrication, and characterization of a recently developed transmission phase grating developed for use in EUV interferometry is described.
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