期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
卷 39, 期 11A, 页码 L1101-L1104出版社
INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.39.L1101
关键词
boron nitride; dielectric constant; plasma-assisted chemical vapor deposition; XPS; FTIR
Polycrystalline boron nitride (BN) films are synthesized by plasma-assisted chemical vapor deposition using BCl3 and N-2 as source gases. X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared absorption (FTIR) measurements are carried out to characterize the BN films. Capacitance-voltage (C-V) characteristics are measured for Au/BN/p-Si samples. The dielectric constant is estimated from the capacitance in the accumulation region and the film thickness. A dielectric constant as low as 2.2 is achieved for the BN film. It is found that incorporation of carbon atoms into BN films is effective in reducing the dielectric constant.
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