期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 70, 期 1-3, 页码 196-202出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0925-4005(00)00569-4
关键词
SnO2; thin film; gas sensor; surface catalyst; platinum
We present an approach to optimize the specific response to gases by using specially prepared nanosized platinum on highly dense sputtered polycrystalline SnO2. Structural and morphological analyses of the SnO2 and platinum thin films were performed. Gas measurements were carried out with single chip thin-film SnO2 sensor arrays on silicon substrates. Pt nanoclusters covering the sensitive layer significantly affect the O-3, CO and NO2 sensitivities and the corresponding dynamic response. (C) 2000 Elsevier Science B.V, All rights reserved.
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