期刊
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
卷 37, 期 6, 页码 1026-1029出版社
KOREAN PHYSICAL SOC
DOI: 10.3938/jkps.37.1026
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We report on nanolithography of polythiophene derivatives using an atomic force microscope (AFM) as an exposure tool. These films were prepared using a spin-coating method and a Langmuir-Blodgett method. Then, they were patterned through localized degradation as a result of anodic reactions induced beneath the AFM tip. Novel polythiophene derivatives were synthesized by directly introducing an electron-transporting moiety on the side chain that can accept electrons efficiently. We accomplished the anodization of polythiophene derivatives under various conditions and obtained a pattern with a high resolution of 50 nm line-width. This result indicates that AFM anodization of polythiophene derivatives was accomplished well because of an efficient electron-accepting property.
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