4.7 Article Proceedings Paper

Fabrication of microlenses by direct

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APPLIED SURFACE SCIENCE
卷 168, 期 1-4, 页码 89-91

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ELSEVIER SCIENCE BV
DOI: 10.1016/S0169-4332(00)00597-3

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microlenses; photopolymer; micro-optics

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Growing interest in the manufacture of microlenses results from their standard use as optical components with current applications in the telecommunication industry. A number of techniques were developed by using various materials and processes. One approach involved the ability of self-processing photopolymers to generate microlens arrays. Spatially controlled illumination of a photosensitive layer induced an inhomogeneous photopolymerization involving formation of 3-D polymer network, mass-transport process of reactive species and bending of the surface resulting from a gradient of surface free energy. The imaging process that generated as a relief in the photopolymer layer, exhibited a completely self-processing character without any chemical post-treatment. The lens arrays displayed diameters ranging from less than 100 mum to 1 mm and focal lengths from 100 mum to a few millimeters, depending on photonic, optical and physico-chemical parameters. (C) 2000 Elsevier Science B.V. All rights reserved.

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