4.4 Article

Fabrications of a continuous-flow DNA amplifier using dry film resist

期刊

BIOCHIP JOURNAL
卷 4, 期 3, 页码 179-183

出版社

KOREAN BIOCHIP SOCIETY-KBCS
DOI: 10.1007/s13206-010-4303-9

关键词

DNA; Dry film resist; PCR-chip; Amplifier; MEMS

资金

  1. Ministry of Education, Science Technology (MEST)
  2. Korea Institute for Advancement of Technology (KIAT)

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The fabrication technique of DFR using micro channels can form hundreds micro thickness channels with only a photo-lithography process without any etching. Also, DFR is confirmed low consumption power because DFR has very lower thermal conductivity (2.33 W/mK) in comparison with silicon (168 W/mK) therefore displays high performance in heating an internal sample. As DFR is hydrophilic, it can bond with glasses without any treatment. Therefore, anodic bonding process using silicon bulk micro-machining or an RIE process used in the PDMS fabrication technique using O-2 plasma is not necessary. According to these advantages, it is expected that production cost can be decreased because fabrication costs of the PCR chamber is decreased. In this paper, a soda-lime glass substrate coated with a DFR of the fluid to cycle through different temperature zones was used to form a micro-channel structure and integrated Pt heater continuous-flow PCR.

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