期刊
APPLIED SURFACE SCIENCE
卷 169, 期 -, 页码 549-552出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/S0169-4332(00)00733-9
关键词
PZT thin film; crystalline orientation; polarization direction; distortion of crystal structure
Lead zirconate titanate (PZT) thin films with highly (1 0 0)- and (1 1 1)-preferred orientation are obtained successfully through the control of bottom electrode orientation. The films are investigated in terms of the effect of crystalline orientation on the electric and ferroelectric properties and the microstructure. The differences in electrical properties between (1 0 0)- and (1 1 1)-preferred PZT films are discussed from the viewpoint of the relationship between external field and polarization direction. From the XRD patterns of before and after fatigue, the distortion of crystal structure in (1 0 0)-preferred PZT was observed. From all the above results, we proposed that the grains having (1 0 0) orientation are one of the causes of fatigue. (C) 2001 Elsevier Science B.V. All nights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据