期刊
APPLIED PHYSICS B-LASERS AND OPTICS
卷 72, 期 4, 页码 455-464出版社
SPRINGER-VERLAG
DOI: 10.1007/s003400100500
关键词
-
Two-dimensional maps of atomic hydrogen concentration in reactive gas layers were measured using two-photon laser-induced fluorescence. The measurements were made in conditions of diamond-film chemical vapour deposition using a thermal inductively coupled plasma. Their purpose was to investigate the influence of the atomic hydrogen concentration in the reactive gas layer on the diamond growth. Concentration maps were obtained under parametric variation of the plasma flow conditions. Axial profiles were extracted fi om the measured maps and compared to temperature profiles measured by Rayleigh scattering to determine the degree of chemical non-equilibrium in the reactive layer. The non-uniform quenching over the measured area was accounted for with an iterative calculation of the species concentrations. For small differences of the atomic hydrogen concentration in the reactive layer a large variation in quality of the grown diamond was observed.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据