4.1 Article Proceedings Paper

NIST data resources for surface analysis by X-ray photoelectron spectroscopy and Auger electron spectroscopy

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ELSEVIER SCIENCE BV
DOI: 10.1016/S0368-2048(00)00252-8

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Auger-electron spectroscopy; databases; electron elastic-scattering cross sections; electron inelastic mean free paths; standard test data; surface analysis; X-ray photoelectron spectroscopy

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A description is given of data resources that are available from the National Institute of Standards and Technology (NIST) for X-ray photoelectron spectroscopy (XPS) and Anger-electron spectroscopy. NIST currently has three databases available: an XPS Database, an Electron Elastic-Scattering Cross-Section Database, and an Electron Inelastic-Mean-Free-Path Database. NIST also offers Standard Test Data (STD) for XPS, a set of simulated XPS data designed to evaluate algorithms and procedures for detecting, locating, and measuring the intensities of overlapping peaks in a doublet. The XPS database and the XPS-STD are available over the internet. (C) 2001 Elsevier Science B.V. All rights reserved.

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