期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
卷 40, 期 3B, 页码 2010-2012出版社
INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.40.2010
关键词
silicon single-electron transistor; Coulomb blockade oscillation; electron addition energy; room-temperature operation; ultrasmall quantum dot; MOSFET; quantized level spacing
We demonstrate large Coulomb blockade oscillations in a silicon single-electron transistor (Si SET) whose peak-to-valley ratio is about 2 at room temperature. The device is fabricated in the form of a point-contact metal-oxide-semiconductor field-effect transistor (MOSFET) and the gate oxide is formed by chemical vapor deposition (CVD) instead of thermal oxidation. From the analysis of current-voltage characteristics, it is found that the single-electron addition energy is about 259 meV and the dot diameter is less than 4.4 nm. The mechanism of silicon dot formation is also discussed.
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