期刊
JOURNAL OF SYNCHROTRON RADIATION
卷 8, 期 -, 页码 1054-1055出版社
INT UNION CRYSTALLOGRAPHY
DOI: 10.1107/S0909049501002746
关键词
zone plates; hard X-rays; microfocusing
A method for the fabrication of linear transmission Fresnel zone plates for X-rays in the 8-15 keV photon energy range is presented. The diffractive elements are generated by electron-beam lithography and chemical wet etching of [110]-oriented silicon membrane substrates. Diffractive structures with aspect ratios of more than 30 for 300 nm-wide structures were obtained. The diffraction efficiency of such a lens was measured for 13.3 keV radiation to be 20%.
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