期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
卷 40, 期 5B, 页码 L505-L507出版社
INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.40.L505
关键词
GaN; MSM-PD; dark current; responsivity; internal gain
Back illuminated metal-semiconductor-metal photodetectors based on GaN grown on (0001) sapphire were fabricated and characterized. The photodetector with a thin GaN layer of 0.3 mum exhibited low dark current with a saturation value of 2.06 pA. A visible rejection of more than four orders of magnitude was observed in the spectral responsivity under 5 muW/cm(2) irradiance at 5 V bias. The responsivity was 16.5 A/W at a wavelength of 350 nm, which is 55 times that of the top illumination case. The results imply the presence of high internal gain under back illumination, due to the high density of charge generation.
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