期刊
SCRIPTA MATERIALIA
卷 44, 期 8-9, 页码 1915-1918出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/S1359-6462(01)00808-9
关键词
sputtering; x-ray diffraction; optical spectroscopy; metals; oxides; microstructure