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Quantum-interferometric optical lithography: Towards arbitrary two-dimensional patterns

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PHYSICAL REVIEW A
卷 63, 期 6, 页码 -

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AMER PHYSICAL SOC
DOI: 10.1103/PhysRevA.63.063407

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As demonstrated by Boto et al. [Phys. Rev. Lett. 85, 2733 (2000)], quantum lithography offers an increase in resolution below the diffraction limit. Here, we generalize this procedure in order to create patterns in one and two dimensions. This renders quantum lithography a potentially useful tool in nanotechnology.

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