期刊
JOURNAL OF NANOPARTICLE RESEARCH
卷 3, 期 2-3, 页码 213-218出版社
KLUWER ACADEMIC PUBL
DOI: 10.1023/A:1017998707125
关键词
cluster deposition; dissipation of energy; molecular dynamics simulation; phonon coupling; sticking probability
The fate of clusters emitted onto a substrate falls into several categories including repulsion, soft landing, migration, and explosion, depending on the interaction between the cluster and the substrate. This dynamic behavior of the clusters controls thin-film formation processes from clusters such as cluster ion beam deposition and chemical vapor deposition. Here we describe the collision processes of both Al and Au clusters with a kinetic energy of similar to0.56 eV/atom onto an amorphous SiO2 substrate studied by molecular dynamics simulation, focusing on the dissipation of translational kinetic energy during the collision process. The simulation elucidated that the activation of thermal vibrational energy of the substrate promoted the sticking of the colliding clusters on the substrate. This result suggests that the dissipation of the translational kinetic energy of the colliding cluster is one of the factors that determine the structure formed on a substrate from vapor phase.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据