4.6 Article Proceedings Paper

Plasma chemistry in laser ablation processes

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PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/S0584-8547(01)00192-6

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laser ablation; chemical reactions; oxidation; laser-induced fluorescence

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Based on the results of quantitative spectroscopic diagnostics (LIF in combination with time resolved emission spectroscopy) chemical dynamics in laser-produced plasmas of metallic (Ti, Al,), and graphite samples have been examined. The Nd-YAG (1064 nm, 10 ns, 100 mJ) and excimer XeCl (308 nm, 10 ns, 10 mJ) lasers were employed for ablation. The main attention was focused on the elucidation of a role of oxide and dimer formation in controlling spatio-temporal distributions of different species in the ablation plume. The results of the spatial and temporal analysis of a laser-produced plasma in air indicates the existence of diatomic oxides in the ablation plume both in the ground and excited states, which are formed from reactions between ablated metal atoms and oxygen. The efficiency of the oxidation reaction depends on the intensity and spot diameter of the ablation laser beam. The maximal concentration of TiO molecules are estimated to be of 1 X 10(14) cm(-3) at the time of 10 mus after the start of the ablation pulse. A comparison of spatial - temporal distributions of Ti atoms and excited TiO molecules allow us to find a correlation in their change, which proves that electronically excited Ti oxides are most probably formed from oxidation of atoms in the ground and low lying metastable states. The spectroscopic characterization of pulsed laser ablation carbon plasma has also been performed. The time-space distributions as well as the high vibrational temperature of C-2 molecules indicate that the dominant mechanism for production of C2 is the atomic carbon recombination. (C) 2001 Elsevier Science B.V. All rights reserved.

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