4.6 Article Proceedings Paper

Fundamental studies of dissolution inhibition in poly(norbornene-alt-maleic anhydride) based resins

期刊

RADIATION PHYSICS AND CHEMISTRY
卷 62, 期 1, 页码 69-76

出版社

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/S0969-806X(01)00414-5

关键词

dissolution inhibition; photoacid generators; 193 nm resist

向作者/读者索取更多资源

The dissolution inhibition mechanism for tert-butylcarboxylate (e.g. tert-butyl cholate) dissolution inhibitors and onium salt photoacid generators (PAG's) were examined in terpolymers of poly(norbornene-maleic anhydride-acrylic acid) (P(NB/MA/AA)). For tert-butyl carboxylates, increasing hydrophobicity increased the dissolution inhibition ability. Dissolution promotion tracked with the number of carboxylic acid moieties and the hydrophobicity of carboxylic acids moieties released upon acidolytic cleavage of the tert-butyl carboxylate. For onium salt PAG's, increasing the hydrophobicity and size of fluorinated anions decreased dissolution inhibition. (C) 2001 Elsevier Science Ltd. All rights reserved.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.6
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据