期刊
DIAMOND AND RELATED MATERIALS
卷 10, 期 9-10, 页码 1855-1861出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0925-9635(01)00459-9
关键词
diamond-like carbon (DLC); steel; electron cyclotron resonance (ECR); chemical vapour deposition (CVD); friction; wear
Diamond-like carbon (DLC) films were prepared on AISI 440C steel substrates at room temperature by the electron cyclotron resonance chemical vapor deposition (ECR-CVD) process in C2H2/Ar plasma under different conditions. In order to prevent the inter-diffusion of carbon and improve the adhesion strength of DLC films, functionally gradient Ti/TiN/TiCN/TiC supporting underlayers were deposited on the steel substrates in advance. Using the designed interfacial transition layers, relatively thick DLC films (1-2 mum) were successfully prepared on the steel substrates without delamination. By optimizing the deposition parameters, DLC films with hardness up to 28 GPa and friction coefficients lower than 0.15 against the 100Cr6 steel ball were obtained. In addition, the specific wear rates of the films were found to be extremely low (similar to 10(-17) M-3/Nm). The friction-induced graphitization mechanism of DLC was confirmed by micro-Raman analysis. (C) 2001 Elsevier Science B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据