期刊
APPLIED PHYSICS B-LASERS AND OPTICS
卷 73, 期 5-6, 页码 603-608出版社
SPRINGER HEIDELBERG
DOI: 10.1007/s003400100705
关键词
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High-finesse laterally and vertically waveguide-coupled cylindrical microresonators have been designed and realized in Si3N4 on SiO2 technology using conventional optical lithography. Based on the experimental results and detailed simulations, a comparison between the lateral and vertical coupling schemes is made.
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