期刊
IEE PROCEEDINGS-CIRCUITS DEVICES AND SYSTEMS
卷 148, 期 6, 页码 337-342出版社
IEE-INST ELEC ENG
DOI: 10.1049/ip-cds:20010525
关键词
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A design methodology for linear micro-generators is developed, and is applied to the design of a mm scale electromagnetic micro-generator. The fabrication of a prototype device is also described using generally available microfabrication techniques, and the results of testing the device on a variable amplitude vibration source, in air and vacuum, are presented. The experimental results confirm the design rules and indicate how the generation of useful power levels might be achieved.
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