期刊
JOURNAL OF POWER SOURCES
卷 102, 期 1-2, 页码 167-171出版社
ELSEVIER
DOI: 10.1016/S0378-7753(01)00864-3
关键词
thin-film; supercapacitor; Co3O4; LiPON electrolyte; gas-ratio; capacitance
The electrochemical and structural properties of cobalt oxide films which are deposited at different sputtering gas-ratios Of O-2/(Ar + O-2) are investigated. In order to examine the electrochemical properties of the as-deposited films, all solid-state thin-film. supercapacitors (TFSCs) are fabricated. There Consist Of Co3O4 electrodes and an amorphous LiPON thin-film electrolyte. It is shown that the capacitance behaviour of the Co3O4/LiPON/Co3O4 TFSCs is similar to bulk-type supercapacitor behaviour. It is further shown that the electrochemical behaviour of the TFSCs is dependent on the sputtering gas-ratios. The gas-ratio dependence of the capacitance of the oxide electrode films is discussed based on X-ray diffraction (XRD) and electrical results for the Co3O4 films. (C) 2001 Published by Elsevier Science B.V.
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