Deposition of silane-based self-assembled monolayers onto mesoporous ceramic substrates has been found to be substantially faster from supercritical fluids than from typical condensed phase solutions, In addition, the monolayers so prepared display higher silane population density (6.5 vs 4.6 silanes/nm(2)), fewer defects, and greater stability than those prepared via standard solution method. A mechanistic rationale for the pressure-induced rate enhancement and reduced defect density is presented.
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