期刊
APPLIED PHYSICS LETTERS
卷 79, 期 27, 页码 4571-4573出版社
AMER INST PHYSICS
DOI: 10.1063/1.1429294
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Patterned growth of single-walled carbon nanotubes (SWNTs) is achieved on full 4-in. SiO2/Si wafers. Catalytic islands with high uniformity over the entire wafer are obtained by a deep ultraviolet photolithography technique. Growth by chemical vapor deposition of methane is found to be very sensitive to the amount of H-2 co-flow. Understanding of the chemistry enables the growth of high quality SWNTs from massive arrays (10(7)-10(8)) of well-defined surface sites. The scale up in patterned nanotube growth shall pave the way to large-scale molecular wire devices. (C) 2001 American Institute of Physics.
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