期刊
APPLIED SURFACE SCIENCE
卷 186, 期 1-4, 页码 211-215出版社
ELSEVIER
DOI: 10.1016/S0169-4332(01)00764-4
关键词
laser-surface interaction; surface morphology
We have carried out some experiments on KrF laser irradiation of aluminum surfaces (by using a KrF excimer laser) in air, in order to study the morphological changes induced by the laser pulses as a function of energy density and pulses number. The main parameter, of the irradiated surfaces, under investigation was the surface average roughness (SAR), which exhibits a dramatic change of behavior within three different ranges of energy, namely lower than 0.9 J/cm(2), between 0.9 and 1.6 J/cm(2), and greater than 1.6 J/cm(2). The observed morphological changes are discussed in terms of geometrical configurations leading to preferential interaction between laser pulse and irradiated surface. (C) 2002 Elsevier Science B.V. All rights reserved.
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