期刊
TRIBOLOGY LETTERS
卷 12, 期 2, 页码 95-100出版社
SPRINGER/PLENUM PUBLISHERS
DOI: 10.1023/A:1014044207344
关键词
MEMS; molecular films; stiction; self-assembled monolayers
Despite much progress in surface micromachining technology, adhesion, friction and wear remain key issues, severely limiting the realization and reliability of many microelectromechanical systems (MEMS) devices. In this article, we focus on the use of molecularly thin organic films as release and anti-stiction coatings for MEMS. The various classes of organic films explored for MEMS are reviewed here, followed by a discussion of the current limitations and areas for improvements for this coating technology.
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