4.4 Article

Chemical vapor deposition of 6CuO•Cu2O films on fiberglass

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THIN SOLID FILMS
卷 405, 期 1-2, 页码 23-28

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ELSEVIER SCIENCE SA
DOI: 10.1016/S0040-6090(01)01609-1

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chemical vapor deposition; fiberglass substrates; 6CuO center dot Cu2O films; cuprous oxide

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To coat fiberglass with copper oxides, in particular with the paramelaconite structure 6CuO-Cu2O, we have used the chemical vapor deposition (CVD) procedure of a copper precursor. The deposition of:copper oxides was done using a horizontal-flow reactor, 2,4-pentanedionate copper(II) as precursor and O-2 as carrier-reactant gas at several deposition temperatures. In order to establish a correlation between experimental parameters and the resulting copper species, as well as film quality, the samples that were produced, were evaluated using techniques such as X-ray diffraction (XRD), visible spectrophotometry, scanning electronic microscopy (SEM) and atomic force microscopy (AFM). The most important result is that 6CuO(.)Cu(2)O thin films are obtained over a short range of deposition temperatures. The film growth of this copper phase occurred in the [202] and [004] directions. (C) 2002 Elsevier Science B.V. All rights reserved.

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