期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 82, 期 2-3, 页码 277-283出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0925-4005(01)01064-4
关键词
integrated sensor; gas sensor; surface micro-machine; micro-hotplate; carbon monoxide sensor
We report the first silicon based integrated gas sensor technology using surface micro-machined micro-hotplate (MHP). In this work, the thermally isolated hotplate was fabricated using surface silicon micro-machining technique. Various etching window designs for the polysilicon sacrificial etch were also explored to optimize the surface micro-machining process yield. The front-side surface micromachined MHP provide excellent manufacturing yield compared to the bulk micro-machined counterpart and at the same time retains all the desirable thermal characteristics that are essential to the integrated gas sensor application. Integrated gas sensors with sensitivity down to 1 ppm of carbon monoxide were demonstrated using this technology. This approach has been extended to integrated gas sensor array. (C) 2002 Elsevier Science B.V. All rights reserved.
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