Evaluation of a force sensor based on a quartz tuning fork for operation at low temperatures and ultrahigh vacuum

The noise performance of the force sensor is crucial for optimizing the resolution in non-contact atomic force microscopy. Sensing forces in vacuum and low temperatures is even more demanding than at ambient conditions. Here we analyze the noise performance and the sensitivity of a force sensor based on a quartz tuning fork of which one of the prongs is fixed (qPlus sensor). The noise characteristic of the qPlus sensor, optical and piezoresistive detection schemes at room temperature are compared and the qPlus sensor is investigated at low temperatures. The frequency variation of quartz tuning forks as a function of temperature is experimentally determined for the temperature range from 4 to 300 K. (C) 2002 Elsevier Science B.V. All rights reserved.