期刊
JOURNAL OF LIGHTWAVE TECHNOLOGY
卷 20, 期 4, 页码 745-750出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/50.996599
关键词
add-drop filter; microring resonator; optical waveguide device; polysilane; ultraviolet (UV) trimming
The vertically coupled microring resonator filter is an attractive add-drop wavelength filter due to its functionality and compactness and the possibility of dense integration resulting from the cross-grid configuration. However, in the concatenated 1 x 8 filter array in which the ring radii are changed with the increments of 50 run, the wavelength channel spacing was limited to 5.7 nm due to the resolution limit of photomask (50 nm). Therefore, we developed a new technique to control precisely the channel spacing by an ultraviolet (UV)-trimming technique using polysilane as the over-cladding layer. As a result, we successfully decreased the channel spacing to 0.5 nm, and also controlled the channel spacing precisely, to 1.0 nm using the same trimming technique.
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