期刊
APPLIED PHYSICS LETTERS
卷 80, 期 13, 页码 2266-2268出版社
AMER INST PHYSICS
DOI: 10.1063/1.1466521
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The structure of laser-induced refractory-metal-free C40 TiSi2 has been studied by glancing-angle x-ray diffraction (GAXRD) in detail. The result shows that laser-induced C40 TiSi2 has a hexagonal structure with the P6(2)22 space group and lattice parameters a=0.467 nm and c=0.662 nm. The ordering effect and the stress effect on the TiSi2 film are also discussed based on the GAXRD and micro-Raman results. The C40 phase completely transforms to the technologically important C54 phase at a relatively low temperature of 700 degreesC. (C) 2002 American Institute of Physics.
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