期刊
APPLIED PHYSICS LETTERS
卷 80, 期 14, 页码 2559-2561出版社
AMER INST PHYSICS
DOI: 10.1063/1.1468270
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Stoichiometric BC2N films can be deposited on Si (100) at 800 degreesC, however, they are phase separated as pure carbon and BN phases. Likewise, hybridized boron-carbon nitride (BCN) films can be synthesized on Ni substrates. On Ni, the carbon and BN phases are hybridized through carbon nitride and boron carbide bonds. These films appeared as fibrous nanostructures. Evidence indicates that the Ni substrate acts as a sink for the carbon and forces the carbon composites to grow on top of the B and N atoms. However, as these films are grown thicker, phase separation occurs again. These results indicate that hybridized BCN phases should now be regarded as semiconducting or superhard nanostructures. High-temperature deposition on Ni substrates might be a solution to the obstacle of preparing hybridized BCN phases. (C) 2002 American Institute of Physics.
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