期刊
MICROSYSTEM TECHNOLOGIES
卷 8, 期 2-3, 页码 129-132出版社
SPRINGER-VERLAG
DOI: 10.1007/S00542-002-0166-x
关键词
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Powder injection molding of microstructured parts with high aspect ratios requires feedstocks, which have a high mechanical stability for demolding. The binders of the feedstocks have to allow pressure free and complete debinding and sintering without deformation in the submillimeter range. For complete molding of especially small and complex detailed microstructures, powders with a small particle size have to be used. Additionally the microstructured mold inserts themselves must have an appropriate design, which allows complete filling of the cavity and an easy removal of the molded microstructures. By the development of new binder compositions, adapted micro mold inserts and optimized processing parameters it was possible to manufacture specimens for micromechanical investigations without substrate plates. Thus many machining and finishing worksteps, which have great influence on the mechanical properties of the micro structures, can be omitted.
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