Electron energy distribution function and electron characteristics of conventional and micro hollow cathode discharges

The conventional hollow cathode discharge, micro hollow cathode discharge, and the transition between them have been analyzed. The time independent and spatially averaged electron energy distribution function, electron density, mean electron energy, excitation, and ionization rates have been calculated and compared. The direct comparison showed substantial differences between the conventional and micro hollow cathode discharges, particularly in absorbed power per unit volume, degree of ionization, and excitation and ionization rates. (C) 2002 American Institute of Physics.