We have observed size effects in the structural phase transition of submicron vanadium dioxide precipitates in silica. The VO2 nanoprecipitates are produced by the stoichiometric coimplantation of vanadium and oxygen and subsequent thermal processing. The observed size dependence in the transition temperature and hysteresis loops of the semiconductor-to-metal phase transition in VO2 is described in terms of heterogeneous nucleation statistics with a phenomenological approach in which the density of nucleating defects is a power function of the driving force.
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