期刊
PROCEEDINGS OF THE IEEE
卷 90, 期 6, 页码 1006-1014出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JPROC.2002.1021565
关键词
AlGaN; avalanche; focal plane array; metal-semiconductor-metal (MSM); photodiode; p-i-n; short-wavelength photoconductor; solar-blind ultraviolet photodetector
Recent advances in the research work on III-nitride semiconductors and AlxGa1-xN materials in particular has renewed the interest and led to significant progress in the development of ultraviolet (UV) photodetectors able to detect light in the mid- and near-UV spectral region (lambda similar to200-400 nm). There have been a growing number of applications which require the, use of such sensors and, in many of these, it is important to be able to sense UV light without detecting infrared or visible light, especially from the Sun, in order to minimize the chances of false detection or high background. The research work on short-wavelength UV detectors has, therefore, been recently focused on realizing short-wavelength solar-blind detectors which, by definition, are insensitive to photons with wavelengths longer than similar to285 nm. In this paper the development of AlxGa1-xN-based solar-blind UV detectors will be reviewed. The technological issues pertaining to materials synthesis and device fabrication will be discussed. The current state-of-the-art and future prospects for these detectors will be reviewed and discussed.
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