期刊
PROGRESS IN SURFACE SCIENCE
卷 70, 期 4-8, 页码 187-260出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/S0079-6816(02)00007-2
关键词
photoelectron microscopy; spectromicroscopy; scanning photoelectron microscopy; photoelectron emission microscopy; photoemission; X-ray photoelectron spectroscopy; X-ray absorption spectroscopy; X-ray absorption near edge structure; surface science; materials science; semiconductors; reactions
We review the recent achievements of photoelectron microscopy (PEM), which is a rapidly developing technique that is significantly advancing the frontiers of surface and materials science. The operation principles of scanning photoelectron microscopes (SPEM), using different photon optic systems to obtain a micro-probe of sub-micrometer dimensions, and of the full-field imaging microscope, using electrostatic lenses for magnification of the irradiated sample area, are presented. The contrast mechanisms, based on photon absorption and photon-induced electron emission, are described and the expected development in the photon and electron optics and detection systems are discussed. Particular attention is paid to the present state-of-art performance of the microscopes collecting photoelectrons (PEs), which carry specific information about the lateral variations in the chemical, magnetic and electronic properties of the material under investigation. Selected results, obtained recently with instruments installed at synchrotron light facilities, are used to illustrate the potential of PEM in characterising micro-phases and dynamic processes with a lateral resolution better than 100 nm. (C) 2002 Elsevier Science Ltd. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据